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SOFT X-RAYS FROM COMPACT PLASMA FOCUS
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Executive Summary
This doctoral thesis investigates soft X-ray (SXR) emission from a compact Mather-type dense plasma focus device (NIE-SSC-PFF) operated with neon, argon, and deuterium. A radiative plasma focus theoretical model was developed incorporating shock dynamics and radiative phases, which was confirmed through experiments employing pinhole imaging, transmission grating, flat crystal spectroscopy, filtered PIN diode arrays, and calorimetry, aimed at optimizing SXR sources for semiconductor proximity lithography.
Analysis Confidence: High
ST_CODE: IUMAHE
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DOC-PHD1996L
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Page 1 of 6
Title Page
SOFT X-RAYS
FROM COMPACT PLASMA FOCUS
A THESIS SUBMITTED BY
LIU MAHE
FOR THE DEGREE OF DOCTOR OF PHILOSOPHY
SCHOOL OF SCIENCE
NANYANG TECHNOLOGICAL UNIVERSITY
DECEMBER 1996
NATIONAL INSTITUTE OF EDUCATION
LIBRARY, SINGAPORE
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This doctoral thesis investigates soft X-ray (SXR) emission from a compact Mather-type dense plasma focus device (NIE-SSC-PFF) operated with neon, argon, and deuterium. A radiative plasma focus theoretical model was developed incorporating shock dynamics and radiative phases, which was confirmed thr...